RSAM-12”
Redefining the Paradigm of Wafer Inspection
Rotary-Scanning Ultrasonic NDT System Optimized for Wafer Analysis
RSAM-12" is a rotary-scanning ultrasonic non-destructive testing system specifically developed for high-efficiency wafer inspection.
Rotary Scanning for
Maximum Efficiency
A rotating sample architecture improves inspection throughput and data precision simultaneously
Minimized Redundant
Scanning
Eliminates unnecessary scan regions to maximize data acquisition efficiency
High-Purity
Imaging Data
Noise-reduced, high-resolution ultrasonic images captured in real time
Reliable and
Repeatable Results
Delivers consistent accuracy and data quality across repeated inspections
Application Samples & Scanning Images
Technical
Specifications
| Technical Specifications | |
|---|---|
| Model | RSAM-12" |
| Scanning range | 300 (X) x 300 (Y) mm |
| Scanning velocity | 3.5 rps |
| Step size | 10 ~ 200 µm |
| Frequency range | 5 ~ 200 MHz |
| Number of channels | 1 |
| Digitizer | PCle 16bits 1GSPS |
| Size | 850 (W) x 850 (D) x 1,400 (H) mm |
| Weight | 350 kg |
※ All specifications are fully customizable to meet customer requirements.